A PZT-actuated 2D optical scanner for MEMS image projection display

被引：0
|
作者：
Yasuda, Y. [1 ]
Tani, M. [1 ]
Akamatsu, M. [1 ]
Toshiyoshi, H. [2 ]
机构：
[1] Stanley Elect Co Ltd, R&D Ctr, Aoba Ku, 1-3-1 Eda Nishi, Kanagawa 2250014, Japan
[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
来源：
IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3 | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A MEMS 2D optical scanner for image projection display has been developed by using piezoelectric unimorph actuators of PZT film made by the ADRIP (arc discharge reactive ion plating) technique. Stable raster scan by combining resonant motion for the fast horizontal axis (16.4 kHz, optical 27 degrees) and for the slow vertical axis (77.4 Hz, optical 31 degrees) has made it possible to project monotone bitmap animations. A quasi-static operation for the vertical axis has been also investigated.
引用
收藏
页码：1587 / +
页数：2
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