Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

被引：2

作者：

Summitt, Chris ^{[1
]}

Wang, Sunglin ^{[1
]}

Namnabat, Soha ^{[1
]}

Johnson, Lee ^{[1
]}

Milster, Tom ^{[1
]}

Takashima, Yuzuru ^{[1
]}

机构：

[1] Univ Arizona, Coll Opt Sci, 1630 E Univ Blvd, Tucson, AZ 85721 USA

来源：

OPTICS EXPRESS | 2017年 / 25卷 / 15期

关键词：

WAVE-GUIDES; INTERFACE; MIRRORS;

D O I：

10.1364/OE.25.017960

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 mu m wavelength, with mirror angle of 45 +/- 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously. (C) 2017 Optical Society of America

引用

页码：17960 / 17970

页数：11

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