Electrochemical behavior of bis(β-diketonate)copper complexes

被引:5
|
作者
Denison, GM [1 ]
Evans, AO
Bessel, CA
Skaf, DW
Murray, RW
DeSimone, JM
机构
[1] Univ N Carolina, Dept Chem, Chapel Hill, NC 27510 USA
[2] N Carolina Agr & Tech State Univ, Dept Chem, Greensboro, NC 27411 USA
[3] Villanova Univ, Dept Chem, Villanova, PA 19085 USA
[4] Villanova Univ, Dept Chem Engn, Villanova, PA 19085 USA
[5] N Carolina State Univ, Dept Chem Engn, Raleigh, NC 27695 USA
关键词
D O I
10.1149/1.2047387
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The use of copper to produce interconnects for microchip manufacture has prompted a renewed interest in its corrosion, deposition, and passivation processes. The aqueous electrochemistry of four bis(beta-diketonate)copper complexes (where beta-diketone = acacH, tfacH, hfacH, and tmhdH) in aqueous media has been investigated. Equilibrium constants were used to calculate potential-pH diagrams, varying the beta-diketone ligand, ligand and/or copper concentrations, and the ionic strength of the buffer solution. The theoretical potential-pH diagrams showed good correlation to the experimental data obtained in aqueous solutions. (c) 2005 The Electrochemical Society.
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页码:B435 / B440
页数:6
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