Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

被引:0
|
作者
Witvoet, Gert [1 ,2 ]
Kuiper, Stefan [1 ]
Kramer, Geerten [1 ]
Baeten, Max [1 ]
机构
[1] TNO Tech Sci, Optomechatron Dept, POB 155, NL-2600 AD Delft, Netherlands
[2] Eindhoven Univ Technol, Dept Mech Engn, Control Syst Technol Grp, POB 513, NL-5600 MB Eindhoven, Netherlands
来源
2017 IEEE CONFERENCE ON CONTROL TECHNOLOGY AND APPLICATIONS (CCTA 2017) | 2017年
关键词
MICROSCOPY;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.
引用
收藏
页码:726 / 731
页数:6
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