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- [22] Probe diagnostics in a full wave resonator radio-frequency discharge JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1444 - 1448
- [23] Probe diagnostics in a full wave resonator radio-frequency discharge Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1998, 16 (03): : 1444 - 1448