GaN Schottky Barrier Photodetectors

被引:9
|
作者
Chang, S. J. [1 ,2 ]
Wang, S. M. [1 ,2 ]
Chang, P. C. [3 ]
Kuo, C. H. [4 ]
Young, S. J. [5 ]
Chen, T. P. [1 ,2 ]
Wu, S. L. [6 ]
Huang, B. R. [7 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Adv Optoelect Technol Ctr, Dept Elect Engn, Tainan 70101, Taiwan
[3] Kun Shan Univ, Dept Elect Engn, Tainan 710, Taiwan
[4] Natl Cent Univ, Dept Opt & Photon, Tao Yuan 32001, Taiwan
[5] Natl Formosa Univ, Dept Elect Engn, Yunlin 632, Taiwan
[6] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 833, Taiwan
[7] Natl Taiwan Univ Sci & Technol, Grad Inst Electroopt Engn, Dept Elect Engn, Taipei 106, Taiwan
关键词
Nanorod template; noise; photodetector; ultraviolet; LIGHT-EMITTING-DIODES; INGAN-GAN; DETECTORS; MECHANISM; EPITAXY; LAYER; BLUE;
D O I
10.1109/JSEN.2010.2045889
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the fabrication of GaN photodetectors (PDs) prepared on nanorod template. Using the nanorods template, it was found that we can effectively suppress leakage current, ultraviolet-to-visible rejection ratio and photoconductive gain of the PDs. With -2 V applied bias, it was found that noise equivalent power (NEP) and normalized detectivity (D*) were 7.00 x 10(-10) W and 2.26 x 10(9) cmHz(0.5)W(-1), respectively, for the PD prepared on nanorods template. With the same -2 V bias, it was found that NEP and D* were 3.56 x 10(-6) W and 4.44 x 10(5) cmHz(0.5)W(-1), respectively, for the PD prepared on a conventional sapphire substrate.
引用
收藏
页码:1609 / 1614
页数:6
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