Impact of NiSi2 precipitates electronic structure on the minority carrier lifetime in n- and p-type silicon

被引:6
|
作者
Trushin, M. V. [1 ]
Vyvenko, O. F. [1 ]
Seibt, M. [2 ]
机构
[1] St Petersburg State Univ, VA Fok Inst Phys, Ulyanovskaya 1, St Petersburg 198504, Russia
[2] Univ Gottingen, Phys Inst Georg August 4, D-37077 Gottingen, Germany
来源
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XII | 2008年 / 131-133卷
关键词
silicon; nickel silicide; precipitates; minority carrier diffusion length; hydrogenation;
D O I
10.4028/www.scientific.net/SSP.131-133.155
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Minority carrier diffusion lengths were measured for the set of n- and p-type silicon samples with NiSi2 precipitates of different electronic structure. We found that the type of precipitate electronic states in the upper part of band gap had no influence on the recombination activity of NiSi2 precipitates. Minority carrier diffusion length L was found to be related to the precipitate density N and L similar to 2 x N-1/3 for n-type Si samples and L similar to 1 x N-1/3 for p-Si samples. Hydrogenation of the p-type Si sample with nanoscale nickel silicide precipitates resulted in an increase of the L value up to a factor of 3, while in n-Si L remained practicaly the same. The only hole emission in the samples of both conductivity types was detected in MCTS measurements and the cross section for the hole capture with the electronic states of the precipitaes was estimated to be as large as 10(-11) cm(-2).
引用
收藏
页码:155 / +
页数:2
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