High precision testing method for Fabry-Perot etalon

被引：0
|
作者：
Itoh, S
Yamazaki, Y
Katoh, K
Chen, J
机构：
[1] Tokyo Inst Polytech, Fac Engn, Atsugi, Kanagawa 2430297, Japan
[2] Japan Sci & Technol Corp, CREST, Kawaguchi, Saitama 3320012, Japan
来源：
OPTICAL REVIEW | 2001年 / 8卷 / 03期
关键词：
Fabry-Perot etalon; multiple beam interference; precise measurement; flatness; parallelism;
D O I：
10.1007/s10043-001-0179-1
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a new method for precise measurement of parallelism and relative flatness of a Fabry-Perot etalon. This method is based on the analysis of multiple-beam transmission interference fringe pattern. Two-dimensional defect information is obtained by using small apertures placed over the entire area of the etalon. Experimental results for precise testing of an etalon with repeatability better than lambda /2300 to 3 sigma are presented.
引用
收藏
页码：179 / 183
页数：5
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