Metallic Magnetic Calorimeters with On-Chip dc-SQUID Readout

Metallic magnetic calorimeters (MMCs) are low-temperature particle detectors that are typically read out by using superconducting quantum interference devices (SQUIDs). But since MMCs are sensitive to the input circuitry and the noise performance of the SQUID, the energy resolution of MMCs have not yet reached their fundamental limit. A possible solution to overcome present limits is to maximize the flux coupling by minimizing parasitic inductance in the input circuit. To show the suitability of this approach, we realized a 64 pixel MMC detector array with integrated dc-SQUID readout, i.e., detector and SQUID are on the same chip. We observed an influence of the power dissipation of the SQUID on the detector temperature. We achieved a baseline energy resolution of and for X-rays with energies up to 6 KeV.