Micro-motion stage is a key component in micro-nanometer manufacture and measurement. Lots of stages based on different principles had been developed recent years. Among these stages, the PZT driving one centered these applications. Although PZT driving flexible hinge stage is now being used widely, the driving precision as well as the long term positioning stability is a hard nut to deal, which is the key technique in this field. And also lots of scholars are being engaged in seeking solutions to this problem. In our project, based on the original basic structure, a fiber optical sensor is added to the stage, the structure for sensor installment is designed. The sensor is pre-bended to critical status, which is linear and sensitive to micro deformation so as to fulfill ultra precise driving and positioning demand. For obtaining further higher sensitivity, a serial structure that forms a comb shape is applied. The performance of the sensor is experimentally studied after the optical system and the processing circuits are completed, and the results that the sensor can meet the demands of the driving precision and the positioning stability are presented.
