The nanostructured Origami™ 3D fabrication and assembly process for nanomanufacturing

被引：0
|
作者：
In, HJ [1 ]
Arora, W [1 ]
Buchner, T [1 ]
Jurga, SM [1 ]
Smith, HI [1 ]
Barbastathis, G [1 ]
机构：
[1] MIT, Cambridge, MA 02139 USA
来源：
2004 4TH IEEE CONFERENCE ON NANOTECHNOLOGY | 2004年
关键词：
nanotechnology; microassembly; photolithography; nanostructured origami;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Nanostructured Origami(TM) 3D Fabrication and Assembly Process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.
引用
收藏
页码：358 / 360
页数：3
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