A novel technique for the fabrication of free-standing adhesive films using a polymer template

被引：0
|
作者：
Hansford, DJ [1 ]
Lee, LP [1 ]
Ferrari, M [1 ]
机构：
[1] Univ Calif Berkeley, Biomed Microdevices Ctr, Berkeley, CA 94720 USA
来源：
MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH | 1998年 / 518卷
关键词：
D O I：
10.1557/PROC-518-111
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A technique has been developed that allows the application of free-standing membranes of polymer adhesives used in microfabricated structures. The film is made free-standing by the application of the adhesive to a polymer template, followed by an adhesion step to a microfabricated substrate, and the final release of the film by the removal of the polymer template. It was found that the surface treatment used to treat the Teflon template made it adhere too strongly to the adhesive film for this application. The results show that Gel-Paks make a suitable template for the transference of polymer films over holes of at least micron size.
引用
收藏
页码：111 / 115
页数：3
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