Methods and challenges in laser-induced damage threshold evaluation of volumetric photopolymerized micro-structures

被引:0
|
作者
Cekanavicius, Laurynas [1 ]
Jonusauskas, Linas [1 ,2 ]
Butkute, Agne [1 ]
Malinauskas, Mangirdas [1 ]
机构
[1] Vilnius Univ, Laser Res Ctr, Sauletekis Ave 10, LT-10223 Vilnius, Lithuania
[2] Femtika Ltd, Sauletekio Ave 15, LT-10224 Vilnius, Lithuania
来源
关键词
LIDT; optical resilience; femtosecond radiation; volumetric micro-structures; 3D nanolithography; S-on-1; SZ2080; SU8; FABRICATION; TIP;
D O I
10.1117/12.2307595
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The spread of micro-optical elements fabrication by femtosecond 3D nanolithography is limited due to lack of available optically resilient photopolymers. We have conducted S-on-1 laser-induced damage threshold (LIDT) measurement experiment with two different photopolymers, which demonstrated varying damage probability distribution after which suitable linear approximation technique was not evident. Moreover, different optical damage mechanisms were present during laser irradiation of diverse photopolymers that featured different chemical composition and physical properties. Seeking to determine reliable LIDT evaluation method which would provide trustworthy results for all the investigated materials, we have used three different ISO standard-like approaches. Results comparison for two different cases was conducted concluding that linear approximation of input fluencies range where optical damage probability is 0%<P<100% provides the lowest LIDT value for discussed examples, at the same time showing consistent and suitable for practical applications results.
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页数:7
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