Single-pulse femtosecond laser machining of glass

被引:29
|
作者
Campbell, S [1 ]
Dear, FC
Hand, DP
Reid, DT
机构
[1] Heriot Watt Univ, Sch Engn & Phys Sci, Ultrafast Opt Grp, Edinburgh EH14 4AS, Midlothian, Scotland
[2] Heriot Watt Univ, Sch Engn & Phys Sci, Appl Opt & Photon Grp, Edinburgh EH14 4AS, Midlothian, Scotland
来源
基金
英国工程与自然科学研究理事会;
关键词
laser processing; laser ablation; femtosecond machining;
D O I
10.1088/1464-4258/7/4/002
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe a study of single-pulse machining of glass with 150 fs pulses at 800 nm (Ti:sapphire) and present results demonstrating in a quantitative way the dependence of the machining quality on the focal position and the pulse energy of the laser beam. We report experimental results indicating the creation of sub-diffraction limited structures. A theoretical calculation of the ablation threshold of glass is inferred from our experimental results to be 5.55 J cm(-2). Results are also presented that illustrate the dependence of the machining quality on the pulse duration used. A technique for optimizing the focal position at energies below the machining threshold is detailed and the results of a related study investigating the self-focusing of femtosecond beams in air are described.
引用
收藏
页码:162 / 168
页数:7
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