Silicon subwavelength grating waveguides with high-index chalcogenide glass cladding

Silicon subwavelength grating waveguides enable flexible design in integrated photonics through nano-scale refractive index engineering. Here, we explore the possibility of combining silicon subwavelength gratings waveguides with a high-index chalcogenide glass as a top cladding, thus modifying the waveguiding behavior and opening a new design axis for these structures. A detailed investigation of the heterogeneous SWG waveguide with high-index cladding is presented based on analytical and numerical simulations. We design, fabricate and characterize silicon subwavelength grating waveguide microring resonators with an As20S80 cladding. Thanks to As20S80 negative thermo-optic coefficient, we achieve near athermal behavior with a measured minimum thermally induced resonance shift of -1.54 pm/K, highlighting the potential of subwavelength grating waveguides for modal confinement engineering and to control light-matter interaction. We also show that the chalcogenide glass can be thermally reflowed to remove air gaps inside the cladding, resulting in a highly conformal structure. These types of waveguides can find application in reconfigurable photonics, nonlinear optics, metamaterials or slow light. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement