Thermo-mechanical modeling of a thermo-optically actuated silicon membrane

被引：0
|
作者：
Duarte, JE [1 ]
Morales, FHF [1 ]
Sieiro, J [1 ]
Leseduarte, S [1 ]
Moreno, M [1 ]
机构：
[1] Univ Pedag & Tecnol Colombia, Boyaca, Colombia
来源：
THERMINIC: COLLECTION OF PAPERS PRESENTED AT THE INTERNATIONAL WORKSOP ON THERMAL INVESTIGATIONS OF ICS AND MICROSTRUCTURES | 1998年
关键词：
D O I：
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中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper we present the numerical analysis of a thermo-optically actuated silicon membrane using the ANSYS program. The power is conveyed into the system by means of a 10mW laser beam, which heats and expands the air enclosed in the actuating cavity. The frecuency at which this beam is triggered has been chosen to be 100 Hz and the calculated Bow rate is 1.81 mu l/min. To the best of our knowledge this is the first work that numerically analyzes the performance of a thermo-optically actuated silicon micropump based on the expansion of air.
引用
收藏
页码：155 / 157
页数：3
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