Correction for the inherent aberration of liquid crystal spatial light modulator

Reflective liquid crystal spatial light modulator (SLM) is a widely used optical instrument because of its brilliant and high precision wavefront modulation ability. However, as mentioned by the producer and other researchers, the plane of SLM is not ideally flat but distorted during the manufacturing process. Here, we presented an automatic procedure for aberration correction based on interference. After the aberrations being measured with a wavefront sensor, the correction wavefront is automatically obtained by analyzing these aberrations. Then, the correction wavefront can be used to compensate the inherent distortion of SLM. This method is simple, user friendly and effective.