Ion-beam reduction of the surface of tantalum higher oxide

被引：3

作者：

Alov, N. V. ^{[1
]}

Kutsko, D. M. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Chem, Moscow 119991, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2011年 / 5卷 / 02期

关键词：

RAY PHOTOELECTRON-SPECTROSCOPY; OXYGEN; BOMBARDMENT; OXIDATION; METALS; FILMS; NIOBIUM; ESCA;

D O I：

10.1134/S1027451011030037

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The process of reduction of the surface of higher oxide Ta2O5 under irradiation by inert gas (Ar+) and chemically active gas (O (2) (+) ) ions with an energy of 3 keV in high vacuum is investigated by X-ray photoelectron spectroscopy at room temperature. It is found that intermediate oxide TaO2, lower oxide TaO, and metallic Ta form in the surface layers of Ta2O5 under Ar+ ion bombardment. An insignificant amount of intermediate oxide TaO2 forms in the surface layers of Ta2O5 under O (2) (+) ion bombardment. Ion-beam-induced reduction of the Ta2O5 surface is shown to depend on the type of ion and irradiation dose.

引用

页码：259 / 262

页数：4

共 50 条

[21] ION-BEAM SURFACE MODIFICATION OF ALUMINUM
MCCAFFERTY, E
NATISHAN, PM
HUBLER, GK
CORROSION SCIENCE, 1993, 35 (1-4) : 239 - 246
[22] ION-BEAM SYSTEMS FOR SURFACE ANALYSIS
HURLEY, RE
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (11): : 1025 - +
[23] EJECTION ANGLE DEPENDENCE OF ELECTRICAL-PROPERTIES OF ION-BEAM SPUTTERED TANTALUM OXIDE-FILMS
ISHIYAMA, K
TAGA, Y
APPLIED PHYSICS LETTERS, 1991, 58 (06) : 577 - 579
[24] ION-BEAM ETCHING OF SURFACE GRATINGS
SMITH, HI
MELNGAILIS, J
WILLIAMSON, RC
BROGAN, WT
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1127 - 1127
[25] ION-BEAM PROCESSING FOR SURFACE MODIFICATION
HIRVONEN, JK
ANNUAL REVIEW OF MATERIALS SCIENCE, 1989, 19 : 401 - 417
[26] ION-BEAM LOOKS BELOW THE SURFACE
WYLIE, P
ENGINEER, 1985, 260 (6736) : 40 - 40
[27] NEW OXIDATION-STATE OF TANTALUM OXIDE FORMED BY REACTIVE ION-BEAM COSPUTTERING OF TA AND SI
MORISAKI, H
MASAKI, S
WATANABE, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1767 - 1770
[28] INVESTIGATION OF INTERACTION BETWEEN ION-BEAM PLASMA AND PROCESSED SURFACE DURING THE SYNTHESIS OF TANTALUM DIBORIDE AND PENTAOXIDE
Yakovin, S.
Zykov, A.
Dudin, S.
Dakhov, A.
Yefymenko, N.
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2019, (01): : 229 - 232
[29] Ion-beam sputtering deposition of oxide coatings
Tang, Xuefe
Fan, Zhengxiu
Wang, Zhijiang
Guangxue Xuebao/Acta Optica Sinica, 1992, 12 (05): : 473 - 475
[30] Mechanistic insights into ion-beam induced reduction of graphene oxide: An experimental and theoretical study
Jovanovic, Zoran
Gloginjic, Marko
Mravik, Zeljko
Olejniczak, Andrzej
Bajuk-Bogdanovic, Danica
Jovanovic, Sonja
Pasti, Igor
Skuratov, Vladimir
RADIATION PHYSICS AND CHEMISTRY, 2022, 199

← 1 2 3 4 5 →