Review of the filtered vacuum arc process and materials deposition

被引：218
|
作者：
Martin, PJ [1 ]
Bendavid, A [1 ]
机构：
[1] CSIRO, Lindfield, NSW 2070, Australia
来源：
THIN SOLID FILMS | 2001年 / 394卷 / 1-2期
关键词：
filtered cathodic vacuum arc; tetrahedral amorphous carbon; titanium nitride;
D O I：
10.1016/S0040-6090(01)01169-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The problem of removing macroparticle contamination from cathodic arc deposition technology has been addressed by several techniques. These techniques have been sufficiently successful that in recent years improved coatings have been developed and advanced applications are starting to appear. The present paper is a review of these advances and the properties of new materials synthesised using different filtered cathodic arc configurations. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：1 / 15
页数：15
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