BONDING OF LINBO3 THIN FILM ON SI SUBSTRATE USING LASER IRRADIATION

被引：0
|
作者：
Kawano, Hiroki [1 ]
Takigawa, Ryo [1 ]
Ikenoue, Hiroshi [1 ]
Asano, Tanemasa [1 ]
机构：
[1] Kyushu Univ, Nishi Ku, 744 Motooka, Fukuoka, Fukuoka 8190395, Japan
来源：
2015 20TH MICROOPTICS CONFERENCE (MOC) | 2015年
关键词：
LITHIUM-NIOBATE;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.
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页数：2
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