BONDING OF LINBO3 THIN FILM ON SI SUBSTRATE USING LASER IRRADIATION

被引：0

作者：

Kawano, Hiroki ^{[1
]}

Takigawa, Ryo ^{[1
]}

Ikenoue, Hiroshi ^{[1
]}

Asano, Tanemasa ^{[1
]}

机构：

[1] Kyushu Univ, Nishi Ku, 744 Motooka, Fukuoka, Fukuoka 8190395, Japan

来源：

2015 20TH MICROOPTICS CONFERENCE (MOC) | 2015年

关键词：

LITHIUM-NIOBATE;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

引用

页数：2

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