Array element auto-tiling based on capacitive displacement sensor

被引:0
|
作者
Mu, Jie [1 ,2 ]
Jing, Feng [1 ,2 ]
Wang, Xiao [1 ,2 ]
Li, Zhilin [1 ,2 ,3 ]
Zhu, Qihua [1 ,2 ]
Su, Jingqin [1 ,2 ]
Cheng, Ningbo [1 ,2 ,4 ]
Zhou, Song [1 ,2 ]
Zhang, Junwei [1 ,2 ]
Zhou, Kainan [1 ,2 ]
Zeng, Xiaoming [1 ,2 ]
机构
[1] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China
[2] Sci & Technol Plasma Phys Lab, Mianyang 621900, Sichuan, Peoples R China
[3] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Shaanxi, Peoples R China
[4] Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China
关键词
Auto-tiling; array element; capacitive displacement sensor; coherent beam combination; high-power laser facility;
D O I
10.1117/12.2065302
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Array element tiling is one of the key technologies for the coherent beam combination in a high-power laser facility. In this paper, we proposed a method of the array element auto-tiling based on capacitive displacement sensor. The method was verified on a double-pass tiled-grating compressor in XG-III laser facility. The research showed that the method is an effective way to control the misalignment errors automatically, with high precision and long-term stability.
引用
收藏
页数:5
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