共 50 条
- [43] PARAMETRIC COUPLING IN A NONLINEAR ELECTROMECHANICAL SYSTEM JOURNAL OF ENGINEERING FOR INDUSTRY, 1967, 89 (04): : 839 - &
- [44] Micro-electromechanical systems: Motion control of micro-actuators PROCEEDINGS OF THE 37TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, 1998, : 4334 - 4335
- [45] Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors Microsystem Technologies, 2017, 23 : 2013 - 2021
- [46] Micro-electromechanical system (MEMS) component research and development for Army missile applications ACQUISITION, TRACKING, AND POINTING XIII, 1999, 3692 : 112 - 122
- [48] Noise behaviors of a closed-loop micro-electromechanical system capacitive accelerometer Journal of Central South University, 2015, 22 : 4634 - 4644