Measurement of surface topography

被引：0
|
作者：
Kagami, J [1 ]
Hatazawa, T [1 ]
Kawaguchi, T [1 ]
机构：
[1] Utsunomiya Univ, Fac Engn, Dept Mech Syst Engn, Utsunomiya, Tochigi 3218585, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 1998年 / 43卷 / 07期
关键词：
measurement technology; topography; roughness; stylus; profilometer; optical probe; interferometer; SEM; AFM; SPM;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：558 / 565
页数：8
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