Spatial resolution and information transfer in scanning transmission electron microscopy

被引:24
|
作者
Peng, Yiping [1 ]
Oxley, Mark P. [1 ]
Lupini, Andrew R. [1 ]
Chisholm, Matthew F. [1 ]
Pennycook, Stephen J. [1 ]
机构
[1] Oak Ridge Natl Lab, Mat Sci & Technol Div, Oak Ridge, TN 37831 USA
关键词
ADF; STEM; resolution; information transfer; noise; defocus; thickness; detector inner angle;
D O I
10.1017/S1431927608080161
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The relation between image resolution and information transfer is explored. It is shown that the existence of higher frequency transfer in the image is just a necessary but not sufficient condition for the achievement of higher resolution. Adopting a two-point resolution criterion, we suggest that a 10% contrast level between two features in an image should be used as a practical definition of resolution. in the context of scanning transmission electron microscopy, it is shown that the channeling effect does not have a direct connection with image resolution because sharp channeling peaks do not move with the scanning probe. Through a quantitative comparison between experimental image and simulation, a Fourier-space approach is proposed to estimate defocus and sample thickness. The effective atom size in Z-contrast imaging depends on the annular detector's inner angle. Therefore, an optimum angle exists for the highest resolution as a trade-off between reduced atom size and reduced signal with limited information transfer due to noise.
引用
收藏
页码:36 / 47
页数:12
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