The effect of oxygen on magnetic properties and corrosion resistance of Fe-N thin films

被引：3
|
作者：
Xu, D [1 ]
Cai, BC [1 ]
Chen, XD [1 ]
Ding, GF [1 ]
Zhang, MS [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Informat Storage Res Ctr, Thin Film & Microfabricat Opening Lab Educ Minist, Shanghai 200030, Peoples R China
来源：
JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 08期
关键词：
D O I：
10.1063/1.370411
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of oxygen and heat treatment on magnetic properties and corrosion resistance of Fe-N thin films sputter-deposited under various N-2+O-2 partial pressure were investigated. All the as sputtered films have a single phase of alpha-Fe only, except where a high N-2+O-2 partial pressure was used. After annealing at 200-500 degrees C, the structure and magnetic properties of Fe-N-O films were changed. Under suitable conditions the magnetic properties of Fe-N-O films were found to have H-c of 0.5 Oe and 4 pi M-s around 20 kG. It is also demonstrated that the oxygen has improved the corrosion resistance and thermal stability of Fe-N thin film. (C) 1999 American Institute of Physics. [S0021-8979(99)24508-2].
引用
收藏
页码：4571 / 4573
页数：3
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