Flat electromagnetic pressure sensor for harsh environments

被引：2
|
作者：
Dutoit, BM [1 ]
Pilloud, Y [1 ]
Elegibili, F [1 ]
Besse, PA [1 ]
Popovic, RS [1 ]
机构：
[1] Swiss Fed Inst Technol, Inst Microsyst, EPFL, CH-1015 Lausanne, Switzerland
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 1-2期
关键词：
pressure sensor; electromagnetic; force compensation; eddy current; harsh environment; feed-back;
D O I：
10.1016/S0924-4247(01)00508-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A flat force-balanced electromagnetic pressure sensor for harsh environments has been designed and tested from -140 to +140 mbar. It uses corrosion resistant stainless steel membranes without oil filling. It has been designed to have a current consumption smaller than 16 mA, to respect the industrial current loop standard. It has a Linearity of +/-1.5% and a cutoff frequency of 3.8 kHz. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：51 / 56
页数：6
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