Ion beam smoothing with low-energy argon ions and reduction of Neel "orange peel" coupling in magnetic tunnel junctions

被引：10
|
作者：
Beck, PA [1 ]
Roos, BFP [1 ]
Demokritov, SO [1 ]
Hillebrands, B [1 ]
机构：
[1] Tech Univ Kaiserslautern, Fachbereich Phys & Forschungsschwerpunkt MINAS, D-67663 Kaiserslautern, Germany
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 290卷
关键词：
interface roughness; magnetic coupling-interlayer; surface roughness; ion beam smoothing;
D O I：
10.1016/j.jmmm.2004.11.468
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The influence of low-energy argon bombardment with an ion energy of 30-70eV and normal incidence on the morphology of a 15-nm-thick Ni81Fe19 film on SiO2 has been studied at room temperature. Scanning tunneling microscope measurements show a reduction of the root-mean-square roughness of over 40%. For magnetic tunnel junctions prepared by involving ion-beam smoothing process, the Neel coupling is substantially reduced and measured by magneto-optic Kerr magnetometry. © 2004 Published by Elsevier B.V.
引用
收藏
页码：1108 / 1111
页数：4
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