共 50 条
- [41] Vector simulations of dark beam interaction with nano-scale surface features OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III, 2003, 5144 : 26 - 36
- [42] Control of micron-scale adhesion using nano-scale surface features. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U885 - U885
- [46] Image-based nano-scale dimensional metrology METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XX, PTS 1 AND 2, 2006, 6152
- [47] Broadband Spectrometers Based on Nano-scale Difference Interferometers INEC: 2010 3RD INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1 AND 2, 2010, : 297 - 298