On the effects of air-exposure-time and time-dependency of Pb/p-Si Schottky diodes

被引:2
|
作者
Cetinkara, H. A. [1 ]
Guder, H. S. [1 ]
机构
[1] Mustafa Kemal Univ, Fac Sci & Arts, Dept Phys, TR-31034 Antakya, Turkey
关键词
Schottky barrier diode; Air exposure; Ageing; Passivation; TREATED SI(111) SURFACES; BARRIER HEIGHT; CHEMICAL TREATMENT; SILICON SURFACES; AL/SI INTERFACE; NATIVE-OXIDE; CONTACTS; HF; PASSIVATION; OXIDATION;
D O I
10.1016/j.physb.2010.08.019
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The effects of air-exposure-time and time-dependency (ageing) on the Pb/p-Si Schottky diodes have been investigated by room temperature I-V and C-V measurements. The barrier height (BH) values between I-V and C-V measurements of the air-exposed samples have been found to be higher than those of the reference diode, and associated with the passivation of the intrinsic surface states on the cleaned Si surface. The ideality factor and the BH values of the air-exposed samples have reached to saturation after ten days air-exposure and the case has been interpreted as the saturation of the oxide layer thickness. The ageing has increased the ideality factors while decreasing the BHs of the samples with increasing ageing time. Both of the parameters have reached to the saturation at 720 h after metal deposition. The carrier concentrations of the air-exposed samples have been considerably lower than that of the reference diode and decreased with increasing exposure-time to air and ageing. This result has been attributed to the passivation of the acceptors by hydrogen atoms diffused into the semiconductor and so the surface Fermi level unpinning. The BH values determined from C-V measurements have reached to equilibrium BH values at 720 h after metal deposition as determined from I-V measurements. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:4480 / 4487
页数:8
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