CMOS Photonics: A Platform for Optoelectronics Integration

被引:5
|
作者
Pinguet, Thierry [1 ]
Gloeckner, Steffen [1 ]
Masini, Gianlorenzo [1 ]
Mekis, Attila [1 ]
机构
[1] Luxtera Inc, Carlsbad, CA 92011 USA
关键词
WAVE-GUIDE PHOTODETECTORS; SILICON; DETECTOR; GE;
D O I
10.1007/978-3-642-10506-7_8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe the intimate relationship between process, devices, and system design by examining the development of Luxtera's CMOS Photonics technology. We address the challenges of integrating optoeletronic elements, including germanium photodiodes, in a commercial CMOS process without significantly affecting the electronics performance and the manufacturability of the process. The common practices of the electronics design and manufacturing industry are applied to our optoelectronic technology; we discuss our device library and our design and testing infrastructure in support of the engineering of complex optoelectronic circuits and systems. Finally, we use a complete monolithically integrated wavelength division multiplexed 40 Gbps transceiver chip as an example of the application of our complete technology platform and the demonstration of its capabilities for optoelectronic integration.
引用
收藏
页码:187 / 216
页数:30
相关论文
共 50 条
  • [31] Integration of photonics components in state-of-the-art CMOS technology
    Lustenberger, F.
    Leipold, D.
    SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS, 2008, 6996
  • [32] Photonic-electronic integration with polysilicon photonics in bulk CMOS
    Ram, Rajeev J.
    SILICON PHOTONICS X, 2015, 9367
  • [33] Fully integrated VLSI CMOS and photonics "CMOS photonics"
    Gunn, Cary
    2007 Symposium on VLSI Technology, Digest of Technical Papers, 2007, : 6 - 9
  • [34] Diamond Color Center Integration with a Silicon Carbide Photonics Platform
    Radulaski, Marina
    Tzeng, Yan-Kai
    Zhang, Jingyuan Linda
    Ishiwata, Hitoshi
    Lagoudakis, Konstantinos G.
    Dory, Constantin
    Fischer, Kevin A.
    Kelaita, Yousif A.
    Sun, Shuo
    Maurer, Peter C.
    Alassaad, Kassem
    Ferro, Gabriel
    Shen, Zhi-Xun
    Melosh, Nicholas A.
    Chu, Steven
    Vuckovic, Jelena
    2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2018,
  • [35] Porous anodic alumina for photonics and optoelectronics
    Gavrilov, S
    Kravtchenko, D
    Zheleznyakova, A
    Timoshenko, V
    Kashkarov, P
    Melnikov, V
    Zaitsev, G
    Golovan, L
    MICRO- AND NANOELECTRONICS 2003, 2004, 5401 : 235 - 241
  • [36] Carbon-nanotube photonics and optoelectronics
    Phaedon Avouris
    Marcus Freitag
    Vasili Perebeinos
    Nature Photonics, 2008, 2 : 341 - 350
  • [37] CMOS photonics
    Gunn, C
    2005 2nd IEEE International Conference on Group IV Photonics, 2005, : 26 - 26
  • [38] Monolithic integration of electro-absorption modulators and photodetectors on III-V CMOS photonics platform by quantum well intermixing
    Sekine, Naoki
    Sumita, Kei
    Toprasertpong, Kasidit
    Takagi, Shinichi
    Takenaka, Mitsuru
    OPTICS EXPRESS, 2022, 30 (13): : 23318 - 23329
  • [39] INTEGRATION OF OPTOELECTRONICS
    HOLMES, L
    ELECTRONICS AND POWER, 1980, 26 (06): : 463 - 464
  • [40] Carbon-nanotube photonics and optoelectronics
    Avouris, Phaedon
    Freitag, Marcus
    Perebeinos, Vasili
    NATURE PHOTONICS, 2008, 2 (06) : 341 - 350