Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography

被引:103
|
作者
Maruo, S [1 ]
Ikuta, K [1 ]
Korogi, H [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Nagoya, Aichi 4648603, Japan
关键词
micromanipulators; microturbine; optically driven micromachine; two-photon microstereolithography;
D O I
10.1109/JMEMS.2003.817894
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have fabricated optically driven micromechanisms and demonstrated their motion under optical force. All of the movable microcomponents are directly fabricated through an assembly-free process using the high-speed scanning of a femtosecond laser focused inside a photocurable resin. Since these movable micromachines are made from photocurable resin transparent to visible and near-infrared light, they can be driven by the force of optical trapping. We demonstrate a simple, versatile method for driving movable micromachines. Part of the movable component is optically trapped by a single laser beam and manipulated according to the desired trajectory. Various types of motion, including rotation and swinging are demonstrated. In addition, the optically driven micromachines can be force-controlled to femtonewton order by adjusting the position trapped by the laser beam. We demonstrated the femtonewton order force-controllable swing motion of micromanipulators. A microturbine was rotated by circular scanning of a trapping laser beam in a liquid. Such force-controllable optically driven micromachines are promising manipulation tools for biomolecules such as DNA and protein.
引用
收藏
页码:533 / 539
页数:7
相关论文
共 8 条
  • [1] Two-photon polymerization process for optically driven micromachines
    Knöner, G
    Higuet, J
    Parkin, S
    Nieminen, TA
    Heckenberg, NR
    Rubinsztein-Dunlop, H
    PHOTONICS: DESIGN, TECHNOLOGY, AND PACKAGING II, 2006, 6038
  • [2] Optically driven micromachines produced by two-photon microstereolithography
    Maruo, Shoji
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2006, 231
  • [3] Optically driven micromanipulation tools fabricated by two-photon microstereolithography
    Maruo, S
    Ikuta, K
    Korogi, H
    THREE-DIMENSIONAL NANOENGINEERED ASSEMBLIES, 2003, 739 : 269 - 274
  • [4] Fabrication of microstructures for optically driven micromachines using two-photon photopolymerization of UV curing resins
    Asavei, Theodor
    Nieminen, Timo A.
    Heckenberg, Norman R.
    Rubinsztein-Dunlop, Halina
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (03):
  • [5] Two-photon excitation microfluorometer for multiplexed single-step bioaffinity assays
    Soini, JT
    Soukka, JM
    Soini, E
    Hänninen, PE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (07): : 2680 - 2685
  • [6] Single-step fabrication of superhydrophobic surfaces by two-photon polymerization micro 3D printing
    Bunea, Ada-Ioana
    Szczotka, Nina
    Navne, Jesper
    Taboryski, Rafael
    MICRO AND NANO ENGINEERING, 2023, 19
  • [7] Magnetically driven micro-optical choppers fabricated by two-photon polymerization
    Lei, Xiaonan
    Peng, Sida
    Niu, Yahua
    Sun, Shengzhi
    Zhu, Yi
    Qiu, Jianrong
    OPTICS LETTERS, 2023, 48 (03) : 835 - 838
  • [8] Quaternary CsPbX3 (X = Cl1-xBrx, Br1-xIx) alloy microplates synthesized by single-step chemical vapor deposition and their two-photon absorption (TPA) properties
    Hossain, Mohammad Kamal
    Qarony, Wayesh
    Wang, Ying
    Kwok, Cheuk Kai Gary
    Egbo, Kingsley O.
    Tsang, Yuen Hong
    Ho, Johnny C.
    Yu, Kin Man
    JOURNAL OF MATERIALS CHEMISTRY C, 2024, 12 (07) : 2561 - 2570