Laser strength of optical materials and coatings for ArF and KrF excimer lasers

This paper presents measured results for the volume and surface laser strength as well as for the nonlinear absorption coefficients of the optical materials LIF, CaF2, MgF2, SiO2, and Al2O3 for the cavity optics of KrF and ArF lasers with a wavelength of 248 and 193 nm. Measured results are presented for the damage thresholds, and the stability against the action of gaseous fluorine-containing media is determined for anti-reflection and reflective multilayer dielectric coatings made from various materials on substrates of quartz glass and CaF2. The results of tests of these materials in the cavities of KrF and ArF lasers are shown. (C) 1996 The Optical Society of America.