High Q optomechanical resonators in silicon nitride nanophotonic circuits

被引:0
|
作者
Fong, King Yan [1 ]
Pernice, Wolfram [1 ,2 ]
Li, Mo
Tang, Hong [1 ,2 ]
机构
[1] Yale Univ, Dept Elect Engn, 15 Prospect St, New Haven, CT 06520 USA
[2] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate nanophotonic circuits for integration of high Q micromechanical resonators and nanooptical components. Mechanical resonance of nanostring is actuated and readout by optomechanical interaction. Quality factor up to 696,000 is obtained.
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页数:2
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