Monte Carlo simulation techniques for quantitative X-ray microanalysis

Monte Carlo simulations of electron diffusion become of increasing interest for scanning electron microscopy (SEM), X-ray microanalysis (XRMA) and Auger electron spectroscopy (AES) due to the increasing speed and storage capability of modern PCs. Depth distribution functions can be calculated in less than a minute also for complex specimen structures. To apply Monte Carlo simulations in the energy range of 0.1-50 keV it is necessary to use a data base of Mott elastic cross-sections calculated by the partial-wave method. For most applications it is sufficient to consider inelastic scattering by the Bethe continous-slowing-down approximation and inner-shell ionisations with energy losses larger than 100-200 eV by the Gryzinski cross-section. In future, energy-loss functions obtained by a Kramers-Kronig analysis of experimental electron energy-loss spectra (EELS) will become of interest for a better consideration of straggling effects during the slowing-down.