Design, analysis and experiments of a stick-slip piezoelectric actuator working under the self-deformation mode

In this paper, the self-deformation mode of the stick-slip principle was proposed, and accordingly a piezoelectric actuator based on the self-deformation mode was designed, which could achieve stable bidirectional outputs with long stroke. To increase the stepping displacement of the output end and reduce the structural stress, an arc-shape flexible hinge with variable section was employed as the output part of the flexible hinge mechanism. The self-deformation motion was obtained by the deformation of the driving mechanism caused by the reaction force of the mover in the driving process. The stepping and self-locking characteristics of the actuator under various initial gaps were tested, and the evolution of stepping characteristics with the driving voltage, frequency and external load was analyzed. The experimental results showed that by the self-deformation mode, the long stroke with good linearity could be easily achieved for both the forward and reverse motions, and the maximum self-locking force reached 5 N. Furthermore, the maximum driving speed reached 2754 mu m s(-1) under the driving voltage of 120 V.