Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

被引：17

作者：

Tsai, Jui-che ^{[1
,2
]}

Lu, Li-Cheng ^{[1
,2
]}

Hsu, Wei-Chi ^{[1
,2
]}

Sun, Chia-Wei ^{[3
]}

Wu, Ming C. ^{[4
,5
]}

机构：

[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 10617, Taiwan

[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan

[3] Ind Technol Res Inst, Med Elect & Device Technol Ctr, Hsinchu, Taiwan

[4] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[5] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 01期

关键词：

D O I：

10.1088/0960-1317/18/1/015015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A driving scheme using a pair of differential voltages (V-x, V-y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of +/- 3.2 is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V.

引用

页数：8

共 50 条

[31] Flexures for Large stroke Electrostatic Comb-Drive Actuators
Chauhan, Rahul
Pandey, Manoj
2016 INTERNATIONAL CONFERENCE ON MICROELECTRONICS, COMPUTING AND COMMUNICATIONS (MICROCOM), 2016,
[32] Vertical comb-drive MEMS mirror with sensing function for phase-shift device
Oda, Kentaro
Takao, Hidekuni
Terao, Kyohei
Suzuki, Takaaki
Shimokawa, Fusao
Ishimaru, Ichirou
Ohira, Fumikazu
SENSORS AND ACTUATORS A-PHYSICAL, 2012, 181 : 61 - 69
[33] Two-axis micromirror scanner
Johnson, MD
Loebel, NG
Gitlin, ML
Paradise, NF
OPTICAL SCANNING: DESIGN AND APPLICATIONS, 1999, 3787 : 88 - 95
[34] A MICROASSEMBLY PROCESS TO REALIZE ANGULAR VERTICAL COMB ELECTRODES FOR A GIMBAL-LESS TWO-AXIS ELECTROSTATIC SCANNER
Jun, Min-Ho
Moon, Seunghwan
Lee, Jong-Hyun
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
[35] Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb-Drive Actuators: A Design Approaches
Tamsir, Agus Santoso
Wijaya, Sandy Tannu
Majlis, Dato'Burhanuddin Yeop
MAKARA JOURNAL OF TECHNOLOGY, 2014, 18 (02): : 59 - 62
[36] A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors
Lin, Tung-Wei
Hou, Max Ti-Kuang
Chen, Rongshun
Experimental Mechanics in Nano and Biotechnology, Pts 1 and 2, 2006, 326-328 : 1379 - 1382
[37] RF-MEMS switching devices using vertical comb-drive actuation in the CMOS process
Naito, Y.
Nakamura, K.
Onishi, K.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (04)
[38] Analysis, testing and optimisation of electrostatic comb-drive levitational actuators
A. Molfese
A. Nannini
G. Pennelli
F. Pieri
Analog Integrated Circuits and Signal Processing, 2006, 48 : 33 - 40
[39] A micro transportation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators
Pham, Phuc Hong
Dao, Dzung Viet
Sugiyama, Susumu
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (10) : 2125 - 2131
[40] Analysis, testing and optimisation of electrostatic comb-drive levitational actuators
Molfese, A
Nannini, A
Pennelli, G
Pieri, F
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2006, 48 (01) : 33 - 40

← 1 2 3 4 5 →