Nanofaceting of LiNbO3 X-cut surface by high temperature annealing and titanium diffusion

被引：14
|
作者：
Kalabin, IE
Grigorieva, TI
Pokrovsky, LD
Sheglov, DV
Shevtsov, DI
Atuchin, VV
机构：
[1] Russian Acad Sci, Inst Semicond Phys, Lab Opt Mat & Struct, SB, Novosibirsk 630090, Russia
[2] Inst Semicond Phys, Lab Electron Microscopy & Submicron Struct, Novosibirsk 630090, Russia
[3] Perm State Univ, Dept Solid State Phys, Perm 614300, Russia
来源：
OPTICS COMMUNICATIONS | 2003年 / 221卷 / 4-6期
关键词：
lithium niobate; atomic force microscopy; optical waveguide; surface morphology;
D O I：
10.1016/S0030-4018(03)01537-2
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The topmost surface of crystal during Ti-indiffused LiNbO3 waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with high step similar to0.24 nm as a result of high temperature annealing has been detected. The global changing of surface morphology induced by Ti diffusing was observed. No new phase formation on the surface was detected. (C) 2003 Published by Elsevier Science B.V.
引用
收藏
页码：359 / 363
页数：5
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