Integrated fuel cell micro power system by microfabrication technique

In this paper, we report a silicon/glass based micro fuel cell system fabricated by the micromachining technique. The anode and cathode catalyst layers are formed by directly sputtering platinum on the ICP-etched (Inductively Coupled Plasma) high-aspect-ratio columns on silicon substrate. Integrated gold-based micro current collectors are patterned on the silicon and glass surfaces. This prototypical micro fuel cell fed by H-2/O-2 demonstrates an output power of 7.10 mw/cm(2). An improved power of 12.3 mw/cm(2) is achieved by a novel etching process. Both prototypes are also tested with methanol/O-2, and the maximum output power is 0.10 mW/cm(2) and 0.15 MW/cm(2), respectively., Low internal resistance (around 0.7 Omega(.)cm(2)) is achieved when using thin gold film (200 nm) as current collectors and the catalyst surface roughness does not affect the internal resistance.