Fabrication of a Miniaturized Thin-Film Temperature Sensor on a Sapphire Fiber Tip

被引：30

作者：

Wang, Jiajun ^{[1
]}

Lally, Evan M. ^{[1
]}

Dong, Bo ^{[1
]}

Gong, Jianmin ^{[1
]}

Wang, Anbo ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Ctr Photon Technol, Bradley Dept Elect & Comp Engn, Blacksburg, VA 24061 USA

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 12期

关键词：

Coating; fiber sensor; high temperature; sapphire; tantalum pentoxide; thin-film; FABRY-PEROT-INTERFEROMETER;

D O I：

10.1109/JSEN.2011.2160340

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a miniature thin-film-based high-temperature sensor prototype with potential for batch fabrication. A thin Tantalum Pentoxide film was deposited on the tip of a polished sapphire fiber using electron-beam evaporation. Using low-coherence optical interferometry, the film was tested as a temperature sensor from 200 degrees C to 1000 degrees C, and its resolution was measured to be 1.4 degrees C. In addition to its potential for low-cost batch production, the sensor's ultra-miniature size of only 75 mu m makes it ideal for embedded sensing applications in harsh environments.

引用

页码：3406 / 3408

页数：3

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