Some considerations of reduction of reference phase error in phase-stepping interferometry

被引：33
|
作者：
Schwider, J [1 ]
Dresel, T [1 ]
Manzke, B [1 ]
机构：
[1] Univ Erlangen Nurnberg, Lehrsthl Opt, D-91058 Erlangen, Germany
来源：
APPLIED OPTICS | 1999年 / 38卷 / 04期
关键词：
D O I：
10.1364/AO.38.000655
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman-Green-type microlens test interferometer was used for the experiments. (C) 1999 Optical Society of America OCIS codes: 050.5080, 120.3180, 120.5050, 220.4840.
引用
收藏
页码：655 / 659
页数：5
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