Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

被引：64
|
作者：
Lopez, AG [1 ]
Craighead, IIG [1 ]
机构：
[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
来源：
OPTICS LETTERS | 1998年 / 23卷 / 20期
关键词：
D O I：
10.1364/OL.23.001627
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of similar to 40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 mu m. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter. (C) 1998 Optical Society of America.
引用
收藏
页码：1627 / 1629
页数：3
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