Spectroscopic ellipsometry and dark conductivity measurements on p- and n-type microcrystalline silicon films

被引：0
|
作者：
Grabosch, G [1 ]
Fahrner, WR [1 ]
机构：
[1] Fern Univ Hagen, Chair Elect Devices, D-58084 Hagen, Germany
来源：
MICRO MATERIALS, PROCEEDINGS | 2000年
关键词：
D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：1174 / 1174
页数：1
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