High resolution heterodyne interferometer based on time-to-digital converter

被引:4
|
作者
Wang Fei [1 ]
Long Zhangcai [1 ]
Zhang Bin [1 ]
Zhao Meirong [1 ]
机构
[1] Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 04期
基金
中国国家自然科学基金;
关键词
LASER INTERFEROMETER; COCHLEAR MECHANICS; PHASE MEASUREMENT;
D O I
10.1063/1.4704357
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new heterodyne interferometer is presented, which adopts time-to-digital converter ( TDC) measuring the time intervals of zero crossings of heterodyne signal for phase demodulation. Thanks to the 0.1 ns time resolution of TDC and linear phase demodulation, it can achieve high resolution and avoids nonlinear measuring distortion in other indirect high precise phase demodulation methods, such as pulse width modulation (PWM) and in-phase/quadrature (I/Q) method. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4704357]
引用
收藏
页数:4
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