Study of heavy ion induced single event gate rupture effect in SiC MOSFETs
被引:1
|
作者:
Liang Xiaowen
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Liang Xiaowen
[1
,2
]
Feng Haonan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Feng Haonan
[1
,2
]
Pu Xiaojuan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Pu Xiaojuan
[1
,2
]
Cui Jiangwei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Cui Jiangwei
[1
]
Sun Jing
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Sun Jing
[1
]
Wei Ying
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Wei Ying
[1
]
Zhang Dan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Zhang Dan
[1
,2
]
Yu Xuefeng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Yu Xuefeng
[1
]
Guo Qi
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R ChinaChinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
Guo Qi
[1
]
机构:
[1] Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
SiC MOSFET;
heavy ion irradiation;
SiO2;
leakage current;
single event gate rupture (SEGR);
POWER MOSFETS;
BURNOUT;
MECHANISM;
DAMAGE;
D O I:
10.35848/1347-4065/ac7dd4
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Single Event Gate Rupture (SEGR) is one of the most severe problems that SiC MOSFETs experience in the space radiation environment. The influence of drain bias (V (DS)) and gate bias (V (GS)) on SEGR was explored in this work using the fluctuation of leakage current when the device was irradiated at various biases. The source of leakage current is isolated and determined through testing, and the influence mechanisms of V (GS) and V (DS) effects on SEGR are further explored using TCAD simulation. The investigation demonstrates that while the drain bias can indirectly enhance the potential of SiC-side oxide, the gate bias can directly alter the potential of metal-side oxide during heavy ion irradiation. When gate bias and drain bias are combined, a strong electric field is generated in the gate oxide, resulting in SEGR in SiC MOSFETs. In addition to single event burnout, the SEGR effect is a significant issue for SiC MOSFETs due to their high susceptibility to heavy ion irradiation.
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Univ Chinese Acad Sci, Sch Integrated Circuits, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Qiu, Leshan
Bai, Yun
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Bai, Yun
Dong, Zewei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Univ Chinese Acad Sci, Sch Integrated Circuits, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Dong, Zewei
Ding, Jieqin
论文数: 0引用数: 0
h-index: 0
机构:
Zhuzhou CRRC Times Semicond Co Ltd, State Key Lab Adv Power Semicond Device, Zhuzhou, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Ding, Jieqin
Hao, Jilong
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Hao, Jilong
Tang, Yidan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Tang, Yidan
Tian, Xiaoli
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Tian, Xiaoli
Li, Chengzhan
论文数: 0引用数: 0
h-index: 0
机构:
Zhuzhou CRRC Times Semicond Co Ltd, State Key Lab Adv Power Semicond Device, Zhuzhou, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Li, Chengzhan
Liu, Xinyu
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China