Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

被引：0

作者：

Xu, F ^{[1
]}

Chu, F ^{[1
]}

Shepard, JF ^{[1
]}

Trolier-McKinstry, S ^{[1
]}

机构：

[1] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA

来源：

FERROELECTRIC THIN FILMS VI | 1998年 / 493卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d(33) values of similar to 5 pC/N, while poled films have values up to 220 pC/N.

引用

页码：427 / 432

页数：6

共 50 条

[21] Piezoelectric Coefficient Measurement of AlN Thin Films at the Nanometer Scale by Using Piezoresponse Force Microscopy
Shin, Hyunchang
Song, Joon-Tae
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2010, 56 (02) : 580 - 585
[22] Direct Measurement of Inverse Piezoelectric Effects in Thin Films Using Laser Doppler Vibrometry
Acharya, Megha
Lou, Djamila
Fernandez, Abel
Kim, Jieun
Tian, Zishen
Martin, Lane W.
PHYSICAL REVIEW APPLIED, 2023, 20 (01)
[23] Accurate measurement of the piezoelectric coefficient of thin films by eliminating the substrate bending effect using spatial scanning laser vibrometry
Leighton, Glenn J. T.
Huang, Zhaorong
SMART MATERIALS AND STRUCTURES, 2010, 19 (06)
[24] Measurement of transverse piezoelectric properties of PZT thin films
Kanno, I
Kotera, H
Wasa, K
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 107 (01) : 68 - 74
[25] MEASUREMENT OF PIEZOELECTRIC COEFFICIENTS OF FERROELECTRIC THIN-FILMS
LEFKI, K
DORMANS, GJM
JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) : 1764 - 1767
[26] Measurement of longitudinal piezoelectric coefficient of lead zirconate titanate thin/thick films using a novel scanning Mach-Zehnder interferometer
Chao, C
Wang, ZH
Zhu, WG
THIN SOLID FILMS, 2005, 493 (1-2) : 313 - 318
[27] Piezoelectric Effect of Cellulose Nanocrystals Thin Films
Csoka, Levente
Hoeger, Ingrid C.
Rojas, Orlando J.
Peszlen, Ilona
Pawlak, Joel J.
Peralta, Perry N.
ACS MACRO LETTERS, 2012, 1 (07) : 867 - 870
[28] Measurement of longitudinal piezoelectric coefficient of film with scanning-modulated interferometer
Wang, ZH
Zhu, WG
Miao, JM
Chao, C
Tan, OK
SENSORS AND ACTUATORS A-PHYSICAL, 2006, 128 (02) : 327 - 332
[29] Enhanced piezoelectric coefficient and the piezoelectric nanogenerator output performance in Y-doped ZnO thin films
Cheng, Li-Cheng
Brahma, Sanjaya
Huang, Jow-Lay
Liu, Chuan-Pu
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2022, 146
[30] Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients
Maiwa, H
Maria, JP
Christman, JA
Kim, SH
Streiffer, K
Kingon, AI
INTEGRATED FERROELECTRICS, 1999, 24 (1-4) : 139 - 146

← 1 2 3 4 5 →