Effect of nanocrystalline silver impregnation on mechanical properties of diamond-like-carbon films by nano-indentation

Nano-crystalline silver was embedded in diamond-like-carbon films by capacitatively coupled plasma chemical vapour deposition. Films with different nanocrystallite sizes and volume fractions of silver, deposited on glass and silicon (100) substrates have been studied by nano-indentation to evaluate the modulation of mechanical properties caused by silver incorporation into the diamond-like-carbon. Raman, atomic force microscopy, energy dispersive X-ray studies and X-ray diffractions have been utilized to determine the structural properties as well as the bonding environment in these films. Mechanical properties have been seen to be modulated significantly by nanocrystalline silver incorporation.