Quantitative modeling of in situ x-ray reflectivity during organic molecule thin film growth

被引:42
|
作者
Woll, Arthur R. [1 ]
Desai, Tushar V. [2 ]
Engstrom, James R. [2 ]
机构
[1] Cornell Univ, Cornell High Energy Synchrotron Source, Ithaca, NY 14853 USA
[2] Cornell Univ, Sch Chem & Biomol Engn, Ithaca, NY 14853 USA
来源
PHYSICAL REVIEW B | 2011年 / 84卷 / 07期
基金
美国国家科学基金会;
关键词
BY-LAYER GROWTH; AUGER-ELECTRON-SPECTROSCOPY; BEAM-ASSISTED DEPOSITION; EPITAXIAL-GROWTH; REAL-TIME; DIFFRACTION OSCILLATIONS; KINETIC-MODEL; SURFACE; NUCLEATION; SCATTERING;
D O I
10.1103/PhysRevB.84.075479
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Synchrotron-based x-ray reflectivity is increasingly employed as an in situ probe of surface morphology during thin film growth, but complete interpretation of the results requires modeling the growth process. Many models have been developed and employed for this purpose, yet no detailed, comparative studies of their scope and accuracy exists in the literature. Using experimental data obtained from hyperthermal deposition of pentane and diindenoperylene (DIP) on SiO(2), we compare and contrast three such models, both with each other and with detailed characterization of the surface morphology using ex situ atomic force microscopy (AFM). These two systems each exhibit particular phenomena of broader interest: Pentacene/SiO(2) exhibits a rapid transition from rough to smooth growth; DIP/SiO(2), under the conditions employed here, exhibits growth rate acceleration due to a different sticking probability between the substrate and film. In general, independent of which model is used, we find good agreement between the surface morphology obtained from fits to the in situ x-ray data with the actual morphology at early times. This agreement deteriorates at later times, once the root-mean squared (rms) film roughness exceeds about 1 ml. Because layer coverages are under-determined by the evolution of a single point on the reflectivity curve, we also find that the best fits to reflectivity data-corresponding to the lowest values of chi(2)(nu)-do not necessarily yield the best agreement between simulated and measured surface morphologies. Instead, it appears critical that the model reproduces all local extrema in the data. In addition to showing that layer morphologies can be extracted from a minimal set of data, the methodology established here provides a basis for improving models of multilayer growth by comparison to real systems.
引用
收藏
页数:14
相关论文
共 50 条
  • [21] Resonant soft x-ray reflectivity of organic thin films
    Wang, Cheng
    Araki, Tohru
    Watts, Benjamin
    Harton, Shane
    Koga, Tadanori
    Basu, Saibal
    Ade, Harald
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (03): : 575 - 586
  • [22] Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry
    Kondrashov, P.E.
    Smirnov, I.S.
    Lukashov, Y.E.
    Yablokov, S.Yu.
    Baranov, A.M.
    Dowling, D.P.
    Donnelly, K.
    Flood, R.V.
    McConnell, M.L.
    Diamond and Related Materials, 1999, 8 (02): : 532 - 537
  • [23] Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry
    Kondrashov, PE
    Smirnov, IS
    Lukashov, YE
    Yablokov, SY
    Baranov, AM
    Dowling, DP
    Donnelly, K
    Flood, RV
    McConnell, ML
    DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) : 532 - 537
  • [24] Stability of thermoresponsive methylcellulose thin film: x-ray reflectivity study
    Innis-Samson, Vallerie Ann
    Sakurai, Kenji
    X-RAY SPECTROMETRY, 2009, 38 (05) : 376 - 381
  • [25] X-ray reflectivity characterisation of thin-film and multilayer structures
    Zaumseil, P
    Materials for Information Technology: Devices, Interconnects and Packaging, 2005, : 497 - 505
  • [26] In-situ X-ray reflectivity measurement of the interface roughness of the tantalum pentoxides thin film during the RF magnetron sputtering deposition
    Lee, CH
    Huang, TW
    Lee, HY
    Hsieh, YW
    NONDESTRUCTIVE EVALUATION AND RELIABILITY OF MICRO-AND NANOMATERIAL SYSTEMS, 2002, 4703 : 37 - 45
  • [27] Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering
    Ellmer, K
    Mientus, R
    Weiss, V
    Rossner, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 1041 - 1044
  • [28] In-situ X-ray reflectivity measurement of polyvinyl acetate thin films during glass transition
    Mizusawa, Mari
    Sakurai, Kenji
    BURIED INTERFACE SCIENCES WITH X-RAYS AND NEUTRONS 2010, 2011, 24
  • [29] In-Situ X-Ray Reflectivity Study of Imprint in Ferroelectric Thin Films
    Cao, Jiang-Li
    Zhang, Kai
    Solbach, Axel
    Yue, Zhenxing
    Wang, Huang-Hua
    Chen, Yu
    Klemradt, Uwe
    FUNCTIONAL AND ELECTRONIC MATERIALS, 2011, 687 : 292 - +
  • [30] X-Ray Reflectivity and Photoelectron Spectroscopy Study of Aluminum Oxide Thin Film
    Sinha, Mangalika
    Modi, Mohammed H.
    61ST DAE-SOLID STATE PHYSICS SYMPOSIUM, 2017, 1832