Precision control of piezoelectric actuator using inverse hysteresis model and neuro control

In this paper, in order to improve the control performance of piezoelectric actuator, an integrated control structure is proposed. The control structure consists of inverse hysteresis model, to compensate the hysteresis nonlinearty problem, and feedforward feedback controller to give a good tracking performance. The inverse hysteresis model and neural network are used as feed-forward controller, and PID controller is used as a feedback controller. From diverse experiments it is concluded that the proposed control scheme gives good tracking performance than the classical control does.