Performance Analysis of an RF MEMS TPoS Resonator using FE Modelling

被引：0
|
作者：
Farrugia, Russell [1 ]
Grech, Ivan [1 ]
Casha, Owen [1 ]
Micallef, Joseph [1 ]
Gatt, Edward [1 ]
机构：
[1] Univ Malta, Dept Microelect & Nanoelect, Msida, Malta
来源：
2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2015年
关键词：
Piezoelectric; PZT; RF MEMS; TPoS; MEMS Resonator; MEMS filter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents an analysis, using finite element modelling, of a 40 MHz contour-mode RF MEMS resonator based on the SINTEF thin-film piezoelectric-on-substrate (TPoS) fabrication technology. Novel simulation techniques are proposed which enable an exhaustive analysis of the relevant resonator characteristics including temperature drift and quality factor. This model also enables the analysis of possible tuning techniques which can be used to compensate for temperature and process-induced variations in the resonant frequency. The effect of the thickness ratio of the PZT film to the substrate on the resonant frequency and frequency shift is also discussed.
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页数：6
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